Descriptions:
The optical emission spectroscopy in glow discharge (GDOES: Glow Discharge Optical Emission Spectroscopy) is used for qualitative and quantitative element analysis of solids. With the JY 5000 RF it is possible to perform analyses of chemical elements of conductive and non-conductive solids and films.

The basis for this measurement is the process of sputtering the sample material through an RF plasma with a subsequent spectral analysis of the emission spectrums of the sputtered species with the help of the spectrometer. Here the position of the lines characteristic of the elements determines the qualitative and relative intensities for the quantitative composition of the material.

RF sputter source:
- Computer-assisted parameter monitoring
- Analysis of conducting and non-conducting materials

Polychromator:
- Spectral range: 110nm - 620nm
- Spectra resolution: 18 - 25 pm

Monochromator:
- Resolution: 13pm