High sensitive and accurate analysis of small area as a minute 50µm with patented polycapillary X-ray lens!

µEDX series achieve vast improvement on sensitivity of analysis of very small area, which conventional XRF system cannot do. Newly developed polycapillary X-ray lens make it possible to analyze small area minimum 50µm, and therefore µEDX series are suitable for needs in industries like Semiconductor, Electronic parts and foods where high sensitive and resolution analysis are demanded.

Features:

• Shimadzu unique polycapillary X-ray lens (patented) enable high intensity X-ray to a minute target of the sample as a 50µm
• Analysis in atmospheric air from light elements to heavy elements is possible (patent pending).
• Dual CCD camera that equips high magnification mode and low magnification mode helps easy sample positioning.
• Various FP methods of Standard-less FP quantitation, Thin-film FP and BG-FP are embedded as standard feature.
• World first for Energy Dispersive Micro X-ray Fluorescence Spectrometer, five primary X-ray filters with automatic changeover eliminate characteristic X-ray from X-ray tube and improve S/N ratio.
• Automatic multiple elements mapping function is standard feature. Unique transmission image unit to measure transmitted X-ray image simultaneously is available as an optional item.
• Operation system with ease of use
• Choice of thermoelectric cooling detector is available.