FTIR spectrometers FSM are low cost easy-to-use laboratory instruments designed for a wide range of IR spectroscopy applications. 

Basic accessories for IR studies, such as different types of liquid cells, gas cells, including long pathlength cells, specular reflectance accessories, HATR kit, etc. are available.

FTIR spectrometer FSM1201S is a dedicated silicon wafer analyzer with a dual detector design and fully computer controlled sample table. 

The instrument is intended for processing automated testing of silicon wafer parameters according to a profiling pattern given by the operator. Wafer sizes up to 200 mm can be accommodated.

FTIR spectroscopy is a powerful tool for non-destructive characterization of semiconductor wafers and structures. This is confirmed by a number of standards, recognized worldwide, such as SEMI MF1188 and SEMI MF1391, introducing test methods for interstitial oxygen and substitutional carbon content in silicon, or SEMI MF95 describing test method for thickness of epitaxial layers of n-n⁺ or p-p⁺ type silicon structures. Also determination of phosphorous and/or boron concentrations in PSG/BPSG layers is possible, or SOI structures and dielectric films characterization.