Vacuum polysilicon annealing furnace

Usage

     Its suitble for polycrystalline silicon and monocrystal line silicons annealing, it can also be used in laboratory experiments research for sintering and metal heat treatment saws, battery materials, rare earth materials, magnetic materials, photovoltaic materials, chemical materials, ceramic materials etc in universities or research institutes.

Feature

Single room, outside heat type, compact furnace structure

Heating element is decorated around the 360 °circumference of the internal furnace, high temperature uniformity.

The full core fibre chamber ensures a high heat efficiency in the internal furnace. The unique integration of water and electricity connecting structure has the features of low malfunction, debugging quickly, maintenance convenience and low cost.

The unique fast cooling syatem can reduce the furnace temperature quickly and improve the production efficiency. It is only cost more than 2 hours to reduce the temperature from 1000 to 100.

Structure

The vacuum experimental furnace has vertical and horizontal-type two kinds. According to the furnace temperature and the customers technological requirements, using graphite, molybdenum or tungsten as the heating element and heat shield. The programmable PID adjusts are installed. The chamber can be moved out totally so as to maintain easily. An air charging system is equiped which can fill the protection gas or working gas into the furnace, the gasification current capacity is adjustable. The internal recycling cooling system is equiped, which can accelerate the material to cool in the furnace, reducing working period, and its good for improving the product quality and the working efficiency.

According to customers demand, we can update the configuration.

1Equipped with inner fast cooling system

2Equipped with PLC programmable controller and graph terminal touch screen system.

3According to the requirements of vacuum pump to add oil diffuser pump,limitation vacuum degree can reach 6.7×10-4 Pa

4use unique design and selection of the heating element and insulation panel,sintering temperature can reach 2100above.